Scientific Paper

ABSTRACT An exact formulation of the problem of imaging a 2D object through a Köhler illumination system is presented; the accurate simulation of a real layout is then not time-limited, but memory-limited. The main idea behind the algorithm is that the boundary of the region that comprise a typical TCC is made up of circular arcs, and therefore the area – which determines the value of the TCC – should be exactly computable in terms of elementary analytical functions. A change to integration around the boundary leads to an expression with minimal dependence on expensive functions such as arctangents and square roots. Numerical comparisons are made for a simple 2D structure.